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XP-703DIII Trace Leak Detector for Semiconductor Gas

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XP-703DIII Trace Leak Detector for Semiconductor Gas

The XP-703DIII series gas detectors are an effective tool for finding trace leaks within a short response time. The user-friendly alarm feature varies in frequency depending on the concentration of gas detected (intermittent to continuous alarm). An integrated gas sampling pump is standard.

The XP-703DIII is suitable for trace leak detection for gases typically used for semiconductor manufacturing, such as Arsine, Phosphine, Diborane, Silane, Hydrogen etc.

Options available include earphones, telescopic sampling probes and sampling attachments.

Technical Data

Gas detected:

  • Arsine
  • Phosphine
  • Diborane
  • Silane, etc.

Options available include:

  • Earphones
  • Telescopic sampling probe
  • Sampling attachments.

 

Gas Type

Min. detectable concentration (ppm)

Arsine

0.5

Phosphine

0.3

Diborane

0.2

Silane

0.5

Hydrogen

1.0

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