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PS-7 Fixed Gas Detector for Semiconductor / Specialty Gas

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PS-7 fixed gas detector

PS-7 Fixed Gas Detector for Semiconductor / Specialty Gas

The PS-7 detector is compact and lightweight, designed for industries using the wide range of industrial specialty gases in the manufacturing process. Such industries include semiconductor, solar cell, and electronics manufacturing.

The unique feature of the PS-7:

The same detector can be fitted with various pre-calibrated gas sensors, depending on the gas to be monitored. Therefore, if a customer wishes to change the monitored gas due to a change of manufacturing tools / process, he simply must replace the existing gas sensor with a new gas sensor pre-calibrated for detecting the new monitored gas no need to replace the whole detector! This increases the flexibility and reduces the long-term cost of ownership for the customer.

The pre-calibrated sensor means that there is no need to introduce calibration gas at site to test, commission or calibrate the detector this increases safety for working personnel and reduces contamination risk to the cleanroom in the event of accidental release of calibration gas.

The other features of the PS-7 include:

  • 4 digit LCD digital display (with units) and split bar graph
  • Long lifespan sampling pump, with automatic flow
  • Error response if a wrong sensor is inserted to the detector with different
  • Analogue and digital outputs for connection to a central supervisory system
  • Alarm response for high gas concentration (2 stage alarm), low flow, trouble

Technical Data

 List Of Gases Detected: 

NH3
SiH4
SiH2Cl2
AsH3
PH3
Cl2

B2H6
H2Se
GeH4
ClF3
NO
H2S

HCl
HF
HBr
CO
Si2H2
F2
O3

*Not all gases are listed.

  • Power Supply: 24VDC
  • External Outputs:
    • Analog Output: 4-20mA DC (shared with power source negative terminal)
    • Gas Alarm Contact: 1a no-voltage contact/non-latching
    • Trouble Alarm Contact: open collector/Non-latching
  • Options:
    •  Pyrolyser unit for monitoring specific gas types (such as NF3).
    •  DeviceNet interface unit for incorporation into DeviceNet protocol networks (for enhanced communication).

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