Semiconductor Manufacturing / Specialty Gas Detectors

MINERVA offers COSMOS gas detectors from New Cosmos Electric, a reputable gas detector and alarm systems manufacturer from Japan. COSMOS portable gas detectors are equipped with precision sensor/s manufactured by New Cosmos Electric. These sensors are designed to detect gas leaks with the shortest response time and the gas detectors display the gas concentration detected with high accuracy and accompanied by visual and audible alarms to alert the user.

COSMOS offers a range of gas detectors suited for the semiconductor, photovoltaic and electronics manufacturing industries that utilise a wide range of specialty gases and chemicals in their production processes.

Products such as the XPS-7II portable gas detectors and the PS-7 fixed gas detector transmitters use pre-calibrated plug & play gas sensors that offer the following benefits:

• The same detector can be used with different gas sensors (one sensor at a time) thereby reducing cost of ownership, especially when the needs for gas detection change in line with updates to the production processes
• Pre-calibrated sensors do not require the use of calibration gases at site, which reduce the risk of contamination to clean-room production environments

The PS-7 is also offered in different configurations, such as:

• PS-7-05 for NF3 detection using gas sensors with an in-built pyrolyzer
• PS-7-M offers advanced power and signal communication options such as PoE, Ethernet and Modbus RTU (RS-485)